Application
high and low temperature test
Size & Rotation angle(chuck)
6", 360° Rotation
X-Y Travel range (chuck)
6" * 6"
Moving resolution(chuck)
1μm
Sample fixed mode(chuck)
Vacuum adsorption
U shape platen
8 micropositioners available
Platen move range & adjustment mode
lifted up and down 6mm,tuned up and down 25mm
Temperature specification
-100 ~ 200℃(± 0.1°C / hour)
Microscope
X-Y axis : 2" * 2", Z axis : 50.8mm
Micropositioner
12-12-12mm / 8-8-8mm(X-Y-Z Moving range)